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Chemraz® 513
Chemraz® 513 is recommended for a wide variety of semiconductor equipment dry processing applications where seal reliability with minimal contamination is required. The material offers excellent performance in static plasma, photolithography, and diffusion processes where temperatures do not exceed 410°F (210°C) and high-sealing loads are not used. The hardness of this material allows for some hardware finish inconsistency.
Features & Benefits
- Good plasma resistance and physical properties
- Minimal contamination
- Excellent performance history as “universal product”
Applications
- Door seals
- Lid seals
- Slit valves
- Gas inlet seals
- Window seals
- KF fitting seals
- Isolator valve seals
Configurations
- Dry wafer processing equipment seals
- Door seals
- Slit valves
- Window seals
- Isolator valve seals
- Lid seals
- Gas inlet seals
- KF fitting seals
Need something more custom?
Add this to your quote and we can discuss your requirements.
Add this to your quote and we can discuss your requirements.