Chemraz® XPE

Greene Tweed’s Chemraz® XPE is highly resistant to O2 plasma and can be used in a wide range of applications, such as slit valve doors, reaction chamber lid seals, and gate valve seals. This advanced elastomeric material offers the semiconductor and solar industry an alternative to legacy products that quickly erode in the oxygen environment. With excellent resistance to both O2 and CF4 plasmas, this material affords an increased chip yield and maximized production. In addition, XPE seals provide customers with an increased MTBR (mean time between repair) to reduce downtime and maintenance costs.

Features & Benefits

High-temperature capability enables future technology and next-generation applications
Superior O2 plasma resistance resulting in improved product integrity
High CF4 plasma resistance
Reduced product weight loss
Decreased maintenance and replacement requirements
Excellent compression set performance

Applications

Chamber and slit valve seals
Endpoint windows
Gas inlet/outlet seals
Gate and isolator valve seals
Reactant delivery system seals
Reaction chamber lid seals

Configurations

Dry wafer processing equipment seals
Chamber & slit valve seals
Endpoint windows
Gas inlet/outlet seals
Gate and isolator valve seals
Reactant delivery system seals
Reaction chamber lid seals

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