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Chemraz® G13
Chemraz® G13 is an elastomer compound recommended for a wide variety of semiconductor equipment sealing
applications. It provides high seal reliability in aggressive dry plasma processes with continuous operating
temperatures up to 220°C, for use in both static and dynamic sealing locations.
Features & Benefits
- Excellent plasma resistance and physical properties
- Minimal contamination
- High thermal stability
- Low sticking characteristics
Applications
- Door seals
- Lid seals
- Slit valves
- Gas inlet seals
- Window seals
- KF fitting seals
- Isolator valve seals
Resources
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