Chemraz® 629

Chemraz® 629 FFKM is specifically developed by Greene Tweed to meet the rigorous demands of aggressive plasma systems. Its unique formulation provides enhanced plasma resistance in oxygen and fluorine plasma processes, resulting in minimal contamination, less downtime, and higher wafer processing yields.

Features & Benefits

Exceptional plasma resistance in oxygen and fluorine environments
Minimal particulation and surface degradation
High purity, very low metallic ion content
High elasticity allows conformance to hardware and easier seal installation

Applications

Endpoint windows
Bell jar seals
Valve seals
KF fitting seals
Window seals
Isolator valve seals
Lid seals
Gas inlet seals
Slit valve seals
Chamber seals

Configurations

Slit valve seals
Lid seals
Endpoint windows
Valve seals
Window seals
Isolator valve seals
Gas inlet seals
Bell jar seals
KF fitting seals

Temperature Range

–20°C to 260°C (–4°F to 500°F)

For applications facing extreme temperatures, high pressures, or uniquely challenging operating conditions, our global engineering team delivers fully custom‑engineered solutions. Because every critical environment is different, these designs are developed in close collaboration with you—let’s discuss your requirements to build the right solution.

Need something more custom?
Add this to your quote and we can discuss your requirements.