Chemraz® G20

Chemraz® G20 provides high-performance vacuum seals designed for static and dynamic applications. Chemraz® G20 seals are engineered to excel in challenging environments, ensuring optimal performance and longevity. Whether it’s maintaining a critical vacuum performance or safeguarding critical plasma-based processes, Chemraz® G20 seals deliver unparalleled reliability. Chemraz® G20 is a best-in-class, plasma-resistant material for use in all processes used in Memory and Logic IC manufacturing with performance capability beyond 7 nm process integration technology. Chemraz® G20 provides vacuum seals for static and dynamic applications in the chamber, typically used in o-rings.

Features & Benefits

Exceptional fluorine plasma resistance at high temperatures
Minimal particulation & surface degradation
High purity, very low metallic ion content

Applications

Chamber seals
E-seals
Pendulum valves
Static o-rings
RPU valves
Forelines
Flang/NW/ISO fittings

Configurations

Chamber seals
E-seals
Pendulum valves
Static o-rings
RPU valves
Forelines
Flang/NW/ISO fittings

Temperature Range

–18°C to 324°C (0°F to 615°F)

For applications facing extreme temperatures, high pressures, or uniquely challenging operating conditions, our global engineering team delivers fully custom‑engineered solutions. Because every critical environment is different, these designs are developed in close collaboration with you—let’s discuss your requirements to build the right solution.

Need something more custom?
Add this to your quote and we can discuss your requirements.